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Title: Microlithography Download
  • Category:
  • Other systems
  • Tags:
  • File Size:
  • 272kb
  • Update:
  • 2018-04-14
  • Downloads:
  • 0 Times
  • Uploaded by:
  • curbals
 Description: The model for DUV photolithography optimization algorithm, including partially coherent light illumination and photoresist stratification model, takes into account the factor of pupil magnification and electromagnetic wave distortion.
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File list (Check if you may need any files):
FilenameSizeDate
Microlithography\@Litho\computeImage.m 7246 2015-01-19
Microlithography\@Litho\computePixelMaskSpectrum.m 183 2017-09-07
Microlithography\@Litho\computeSource.m 1749 2017-09-14
Microlithography\@Litho\computeSystem.m 1000 2017-10-27
Microlithography\@Litho\Litho.m 3174 2017-10-27
Microlithography\addPathToKernel.m 84 2016-10-13
Microlithography\ComputeEPE.m 656 2017-05-25
Microlithography\computeHp.m 1938 2017-01-04
Microlithography\computeHpSD.m 1690 2017-08-27
Microlithography\computeHpSD_1.m 1768 2017-06-15
Microlithography\computeJCC.m 2420 2017-06-26
Microlithography\computeVectorM.m 1598 2017-06-15
Microlithography\computeVectorM_1.m 1663 2017-06-15
Microlithography\computeVectorT.m 681 2017-06-15
Microlithography\computeVectorT_1.m 744 2017-09-13
Microlithography\conv2mtx_same.m 1534 2013-08-20
Microlithography\ConvInFreq.m 474 2017-03-31
Microlithography\CSTIC2017PrepImage.m 460 2016-12-14
Microlithography\evolve_normal_ENO2_modified.m 1582 2017-06-14
Microlithography\FindSmallestTwoExpo.m 103 2016-10-21
Microlithography\GetZernikeXYPoly.m 3260 2017-10-27
Microlithography\gssLitho.m 1675 2017-05-19
Microlithography\gssMO.m 2008 2017-06-13
Microlithography\imageEPS.m 493 2017-08-24
Microlithography\images\img11.bmp 5690 2017-11-04
Microlithography\images\img12.bmp 5690 2017-11-04
Microlithography\images\img13.bmp 5690 2017-11-04
Microlithography\images\img14.bmp 5690 2017-11-04
Microlithography\images\img15.bmp 5690 2017-11-04
Microlithography\images\img9.bmp 5690 2017-09-08
Microlithography\images\img9c.bmp 1678 2017-09-08
Microlithography\images\resm11.bmp 67898 2017-11-08
Microlithography\images\resm12.bmp 67898 2017-11-08
Microlithography\images\resm13.bmp 67898 2017-11-08
Microlithography\images\resm14.bmp 67898 2017-11-08
Microlithography\images\resm15.bmp 67898 2017-11-08
Microlithography\images\ress11.bmp 2006 2017-11-08
Microlithography\images\ress12.bmp 2006 2017-11-08
Microlithography\images\ress13.bmp 2006 2017-11-08
Microlithography\images\ress14.bmp 2006 2017-11-08
Microlithography\images\ress15.bmp 2006 2017-11-08
Microlithography\images\resultphoto.m 1393 2017-11-08
Microlithography\ImageVelocity.m 4468 2017-06-02
Microlithography\LithoFconju.m 4514 2017-06-18
Microlithography\main_CalcVectorAerial.m 2919 2016-10-15
Microlithography\maskContour.m 282 2017-05-25
Microlithography\Partially\ImageVelocity.m 1858 2017-09-14
Microlithography\Partially\LithoMOconjuP.m 4025 2017-09-08
Microlithography\Partially\main_Litho.m 1559 2017-09-08
Microlithography\PPPPPpengfei_test1.m 71 2017-09-08
Microlithography\PrepSystem.m 1808 2017-06-24
Microlithography\PrepSystemMO.m 1615 2017-08-27
Microlithography\PrepSystemMOconju.m 1632 2017-06-15
Microlithography\rotate90Hp.m 788 2016-10-23
Microlithography\sigmoid_syj.m 622 2009-03-11
Microlithography\SOcomputeT.m 918 2017-06-26
Microlithography\SOconju.m 4712 2017-06-26
Microlithography\source_ADDA.m 3236 2017-09-15
Microlithography\source_ADG.m 3625 2017-09-17
Microlithography\source_RMS.m 3061 2017-09-14
Microlithography\SOVelocity.m 662 2017-05-18
Microlithography\SOVelocityNW.m 954 2017-05-21
Microlithography\Stratifeid\@Layer\computeM.m 361 2017-09-06
Microlithography\Stratifeid\@Layer\Layer.m 776 2017-09-12
Microlithography\Stratifeid\@stack\computemsp.m 603 2017-09-06
Microlithography\Stratifeid\@stack\computeRT.m 815 2017-09-06
Microlithography\Stratifeid\@stack\multiple.asv 503 2017-09-06
Microlithography\Stratifeid\@stack\stack.m 684 2017-09-06
Microlithography\Stratifeid\computeHp.m 8470 2017-09-14
Microlithography\Stratifeid\ED.asv 1597 2017-10-27
Microlithography\Stratifeid\ED.m 1613 2018-02-14
Microlithography\Stratifeid\ImageVelocity.m 5055 2017-09-14
Microlithography\Stratifeid\iteration_get.m 1989 2017-09-19
Microlithography\Stratifeid\Mask_inverse.m 4141 2017-09-19
Microlithography\Stratifeid\multiple.m 440 2017-09-06
Microlithography\Stratifeid\PrepSystem.m 1993 2018-01-05
Microlithography\test.m 3429 2016-10-17
Microlithography\testConv.m 463 2017-04-25
Microlithography\testLitho.m 3473 2017-08-26
Microlithography\testLithoF.m 3919 2017-08-21
Microlithography\testLithoFconju.m 3847 2017-05-31
Microlithography\testSO.m 3197 2017-05-25
Microlithography\testSOconju.m 3263 2017-06-19
Microlithography\testSOnarrow.m 3180 2017-05-19
Microlithography\testSOnarrowConju.m 3299 2017-06-19
Microlithography\test_ILT.m 3255 2016-10-20
Microlithography\ttest.m 654 2017-04-01
Microlithography\VectorModelGk.m 1825 2017-05-12
Microlithography\VectorModelImage.m 2935 2017-01-04
Microlithography\VectorModelImageSD.m 1612 2016-10-27
Microlithography\VectorModelImageSO.m 793 2017-06-16
Microlithography\VectorModelImageTest.m 2265 2017-03-31
Microlithography\VectorModelVelocity.m 3277 2017-01-04
Microlithography\VectorModelVelocitySD.m 1553 2017-05-25
Microlithography\VectorModelVelocityTest.m 3430 2017-05-24
Microlithography\VnIntermediate.m 742 2016-10-23
Microlithography\Stratifeid\@Layer 0 2018-04-14
Microlithography\Stratifeid\@stack 0 2018-04-14
Microlithography\Stratifeid\data 0 2018-04-14
Microlithography\@Litho 0 2018-04-14

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