SMART Microsystems [like Microelectromechanical systems (MEMS)] that combine micro sensors, micro actuators and electronic interface circuitry are having increasing demand in a wide range of applications, including those in industrial process control, aerospace and automobile electronics, distributed sensing systems, environmental monitoring, biomedical devices, etc.[1] Themost important reasons for this are:

Filename	Size	Update
corrected project1	2	31.doc

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