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Microlithography

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  • Update : 2018-04-14
  • Size : 272kb
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  • Author :cur****
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The model for DUV photolithography optimization algorithm, including partially coherent light illumination and photoresist stratification model, takes into account the factor of pupil magnification and electromagnetic wave distortion.
Packet file list
(Preview for download)
FilenameSizeUpdate
Microlithography\@Litho\computeImage.m 7246 2015-01-19
Microlithography\@Litho\computePixelMaskSpectrum.m 183 2017-09-07
Microlithography\@Litho\computeSource.m 1749 2017-09-14
Microlithography\@Litho\computeSystem.m 1000 2017-10-27
Microlithography\@Litho\Litho.m 3174 2017-10-27
Microlithography\addPathToKernel.m 84 2016-10-13
Microlithography\ComputeEPE.m 656 2017-05-25
Microlithography\computeHp.m 1938 2017-01-04
Microlithography\computeHpSD.m 1690 2017-08-27
Microlithography\computeHpSD_1.m 1768 2017-06-15
Microlithography\computeJCC.m 2420 2017-06-26
Microlithography\computeVectorM.m 1598 2017-06-15
Microlithography\computeVectorM_1.m 1663 2017-06-15
Microlithography\computeVectorT.m 681 2017-06-15
Microlithography\computeVectorT_1.m 744 2017-09-13
Microlithography\conv2mtx_same.m 1534 2013-08-20
Microlithography\ConvInFreq.m 474 2017-03-31
Microlithography\CSTIC2017PrepImage.m 460 2016-12-14
Microlithography\evolve_normal_ENO2_modified.m 1582 2017-06-14
Microlithography\FindSmallestTwoExpo.m 103 2016-10-21
Microlithography\GetZernikeXYPoly.m 3260 2017-10-27
Microlithography\gssLitho.m 1675 2017-05-19
Microlithography\gssMO.m 2008 2017-06-13
Microlithography\imageEPS.m 493 2017-08-24
Microlithography\images\img11.bmp 5690 2017-11-04
Microlithography\images\img12.bmp 5690 2017-11-04
Microlithography\images\img13.bmp 5690 2017-11-04
Microlithography\images\img14.bmp 5690 2017-11-04
Microlithography\images\img15.bmp 5690 2017-11-04
Microlithography\images\img9.bmp 5690 2017-09-08
Microlithography\images\img9c.bmp 1678 2017-09-08
Microlithography\images\resm11.bmp 67898 2017-11-08
Microlithography\images\resm12.bmp 67898 2017-11-08
Microlithography\images\resm13.bmp 67898 2017-11-08
Microlithography\images\resm14.bmp 67898 2017-11-08
Microlithography\images\resm15.bmp 67898 2017-11-08
Microlithography\images\ress11.bmp 2006 2017-11-08
Microlithography\images\ress12.bmp 2006 2017-11-08
Microlithography\images\ress13.bmp 2006 2017-11-08
Microlithography\images\ress14.bmp 2006 2017-11-08
Microlithography\images\ress15.bmp 2006 2017-11-08
Microlithography\images\resultphoto.m 1393 2017-11-08
Microlithography\ImageVelocity.m 4468 2017-06-02
Microlithography\LithoFconju.m 4514 2017-06-18
Microlithography\main_CalcVectorAerial.m 2919 2016-10-15
Microlithography\maskContour.m 282 2017-05-25
Microlithography\Partially\ImageVelocity.m 1858 2017-09-14
Microlithography\Partially\LithoMOconjuP.m 4025 2017-09-08
Microlithography\Partially\main_Litho.m 1559 2017-09-08
Microlithography\PPPPPpengfei_test1.m 71 2017-09-08
Microlithography\PrepSystem.m 1808 2017-06-24
Microlithography\PrepSystemMO.m 1615 2017-08-27
Microlithography\PrepSystemMOconju.m 1632 2017-06-15
Microlithography\rotate90Hp.m 788 2016-10-23
Microlithography\sigmoid_syj.m 622 2009-03-11
Microlithography\SOcomputeT.m 918 2017-06-26
Microlithography\SOconju.m 4712 2017-06-26
Microlithography\source_ADDA.m 3236 2017-09-15
Microlithography\source_ADG.m 3625 2017-09-17
Microlithography\source_RMS.m 3061 2017-09-14
Microlithography\SOVelocity.m 662 2017-05-18
Microlithography\SOVelocityNW.m 954 2017-05-21
Microlithography\Stratifeid\@Layer\computeM.m 361 2017-09-06
Microlithography\Stratifeid\@Layer\Layer.m 776 2017-09-12
Microlithography\Stratifeid\@stack\computemsp.m 603 2017-09-06
Microlithography\Stratifeid\@stack\computeRT.m 815 2017-09-06
Microlithography\Stratifeid\@stack\multiple.asv 503 2017-09-06
Microlithography\Stratifeid\@stack\stack.m 684 2017-09-06
Microlithography\Stratifeid\computeHp.m 8470 2017-09-14
Microlithography\Stratifeid\ED.asv 1597 2017-10-27
Microlithography\Stratifeid\ED.m 1613 2018-02-14
Microlithography\Stratifeid\ImageVelocity.m 5055 2017-09-14
Microlithography\Stratifeid\iteration_get.m 1989 2017-09-19
Microlithography\Stratifeid\Mask_inverse.m 4141 2017-09-19
Microlithography\Stratifeid\multiple.m 440 2017-09-06
Microlithography\Stratifeid\PrepSystem.m 1993 2018-01-05
Microlithography\test.m 3429 2016-10-17
Microlithography\testConv.m 463 2017-04-25
Microlithography\testLitho.m 3473 2017-08-26
Microlithography\testLithoF.m 3919 2017-08-21
Microlithography\testLithoFconju.m 3847 2017-05-31
Microlithography\testSO.m 3197 2017-05-25
Microlithography\testSOconju.m 3263 2017-06-19
Microlithography\testSOnarrow.m 3180 2017-05-19
Microlithography\testSOnarrowConju.m 3299 2017-06-19
Microlithography\test_ILT.m 3255 2016-10-20
Microlithography\ttest.m 654 2017-04-01
Microlithography\VectorModelGk.m 1825 2017-05-12
Microlithography\VectorModelImage.m 2935 2017-01-04
Microlithography\VectorModelImageSD.m 1612 2016-10-27
Microlithography\VectorModelImageSO.m 793 2017-06-16
Microlithography\VectorModelImageTest.m 2265 2017-03-31
Microlithography\VectorModelVelocity.m 3277 2017-01-04
Microlithography\VectorModelVelocitySD.m 1553 2017-05-25
Microlithography\VectorModelVelocityTest.m 3430 2017-05-24
Microlithography\VnIntermediate.m 742 2016-10-23
Microlithography\Stratifeid\@Layer 0 2018-04-14
Microlithography\Stratifeid\@stack 0 2018-04-14
Microlithography\Stratifeid\data 0 2018-04-14
Microlithography\@Litho 0 2018-04-14
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