Description: A novel three-dimensional MEMS accelerometer performance characteristics and working principles are studied. For the features of the accelerometer output interface , a data acquisition system is designed based on digital signal processing (DSP) chip, to realize the accelerometer signal high-speed real-time acquisition. The use of multi-channel buffered serial port MCBSP is to achieve SPI bus (mode of) data collection, and the real-time data transmission and storage is achieved by the use of two DMA controllers .Based on the design of DSP data acquisition system, the collected data are processed, the partial values of the stability and output repeatability of the accelerometer at a certain temperature are analyzed, and the performance of accelerometers are assessed.
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Research on 3D-MEMS Accelerometer Performance Test.doc