Title:
Modeling the electromagnetic excitation of a c
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- Other systems
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- File Size:
- 685kb
- Update:
- 2018-03-26
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- 张张110
Description: A numerical model which includes an electromagnetic field model and a fluid plasma model has been developed for a microwave cavity plasma reactor used for diamond thin film deposition.
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| Filename | Size | Date |
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| Modeling the electromagnetic excitation of a c.pdf | 791584 | 2018-01-16 |
