Title:
半导体厂自动化之通讯协定 SECS III & GEM
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- Category:
- Communication
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- File Size:
- 662kb
- Update:
- 2018-09-26
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- 嘻嘻哈哈哈希
Description: SECS communication protocol based on SECS (I) serial port communication
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| Filename | Size | Date |
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| 半导体厂自动化之通讯协定 SECS III & GEM.pdf | 706623 | 2018-09-03 |
